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Precision X-Y robotic object handling using a dual GMR bridge sensor

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4 Author(s)

A dual integrated GMR bridge sensor, which is able to simultaneously detect x and y components of an external magnetic field, was demonstrated, and applied to the precision robotic placement of objects. Two orthogonal GMR bridges are used, biased by two sets of integrated Co78Pt22 film permanent magnets with different coercivities (1230 Oe and 522 Oe, respectively). The field sensitivity is 0.35 mV/(V×Oe) in each field direction. For the positioning application, an absolute accuracy of 10 μm in x-direction has been achieved over more than 1900 cycles which is insensitive to sensor offsets and thermal drifts

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Magnetics, IEEE Transactions on  (Volume:36 ,  Issue: 5 )