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Production of ozone by surface and glow discharge at cryogenic temperatures

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4 Author(s)
S. Masuda ; Masuda Res. Inc., Tokyo, Japan ; S. Koizumi ; J. Inoue ; H. Araki

The generation of ozone at cryogenic temperatures is investigated with a special interest in increasing the yield of ozone by using low temperatures of liquid natural gas. Two modes of plasma chemical processes are studied, both based on electric discharges: one is the high-frequency surface discharge mode under ordinary gas pressure and at a temperature above the liquid temperature of ozone at this pressure (-111°C); the other is the glow discharge mode under a low gas pressure (0.5-2.0 torr) and low gas temperature (-190°C). The surface discharge mode uses a novel ozonizer developed by the authors made of 92% high-purity alumina and tungsten electrodes sintered together. This ozonizer has an extremely high resistance to large temperature gradients and thermal shock, which is a prerequisite for cryogenic operation. The glow discharge mode uses a Pyrex glow tube with a separate liquid-ozone collector. A dramatic improvement in the energy yield of ozone generation is achieved in both modes of cryogenic operation. The results of preliminary test for cryogenic ozone generation are very encouraging

Published in:

IEEE Transactions on Industry Applications  (Volume:24 ,  Issue: 5 )