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On a control of photon-surface plasmon coupling at a multilayer diffraction grating

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4 Author(s)
Dmitruk, N.L. ; Inst. of Semicond. Phys., Acad. of Sci., Kiev, Ukraine ; Mayeva, O.I. ; Mamykin, S.V. ; Yastrubchak, O.B.

This article is devoted to investigation of multilayer diffraction grating using spectroscopic ellipsometry. The present study demonstrates the capability of techniques used as a tool to obtain information about the possibilities to control of photon-surface plasmon coupling at a multilayer diffraction gratings and usefulness especially for optochemical sensors and photodetectors application

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Advanced Semiconductor Devices and Microsystems, 2000. ASDAM 2000. The Third International EuroConference on

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