The technology of producing thin-film photoresistors based on CdS-CdSe solid solutions by the method of cathode three-electrode sputtering with RF-bias is considered. Some characteristics of thin-film photoresistors and optoelectronic convertors, and also examples of their application in high precision measuring instrumentation are given
Published in:
Advanced Semiconductor Devices and Microsystems, 2000. ASDAM 2000. The Third International EuroConference on
Date of Conference: 2000