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Microphysical characterization and residual stress analysts of thin polyimide membranes on GaAs substrate, support for micromachined structures

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7 Author(s)

This paper presents measurements of micromechanical properties of thin polyimide membranes realised by micromachining of SI GaAs substrate, as well as the residual stress analysis of these membranes. AFM, SEM, and white light interferometry as well as a residual stress measurement procedure, have been used

Published in:

Semiconductor Conference, 2000. CAS 2000 Proceedings. International  (Volume:2 )

Date of Conference:

2000