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CMOS microfluidic fabrication technology for biomedical applications

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2 Author(s)
Rasmussen, A. ; Dept. of Electr. Eng. & Comput. Sci., George Washington Univ., Washington, DC, USA ; Zaghloul, M.E.

This paper presents an overview of current techniques available to produce CMOS microfluidic systems. By using the techniques described within this paper, smart, inexpensive, and microscale microfluidic systems are achievable. These systems can combine both the electronics needed for control and signal processing with the microfluidic components to achieve a one-chip complete system

Published in:

Circuits and Systems, 1999. 42nd Midwest Symposium on  (Volume:2 )

Date of Conference:

1999