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A monolithic surface micromachined Z-axis gyroscope with digital output

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4 Author(s)
Xuesong Jiang ; Dept. of Electr. Eng. & Comput. Sci., California Univ., Berkeley, CA, USA ; J. I. Seeger ; M. Kraft ; B. E. Boser

A monolithic surface micromachined Z-axis vibratory rate gyroscope with an on-chip A/D converter is fabricated in a monolithic MEMS/circuits technology with 2 /spl mu/m CMOS and 2.25 /spl mu/m-thick mechanical polysilicon. The on-chip position sense circuit uses correlated double sampling to reject 1/f and kT/C noise and resolves 0.02 angstrom displacements. The gyroscope achieves a noise floor of 3/spl deg//sec//spl radic/Hz at atmospheric pressure and operates from a single 5 V supply.

Published in:

VLSI Circuits, 2000. Digest of Technical Papers. 2000 Symposium on

Date of Conference:

15-17 June 2000