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A monolithic surface micromachined Z-axis vibratory rate gyroscope with an on-chip A/D converter is fabricated in a monolithic MEMS/circuits technology with 2 /spl mu/m CMOS and 2.25 /spl mu/m-thick mechanical polysilicon. The on-chip position sense circuit uses correlated double sampling to reject 1/f and kT/C noise and resolves 0.02 angstrom displacements. The gyroscope achieves a noise floor of 3/spl deg//sec//spl radic/Hz at atmospheric pressure and operates from a single 5 V supply.
Date of Conference: 15-17 June 2000