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Monolithic integration of 1.3-/spl mu/m Stark-ladder electroabsorption waveguide modulators with multimode-interference splitters

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6 Author(s)
Harrison, L.J. ; Army Res. Lab., Adelphi, MD, USA ; Tayag, T.J. ; Simonis, G.J. ; Stead, M.
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In this letter, we describe a novel fabrication process for the monolithic integration of a waveguide power splitter based on the multimode-interference effect with multiple-quantum well (MQW) electroabsorption modulators based on the Stark-ladder effect. The integrated device is fabricated by a one-step epitaxy process using molecular-beam-epitaxy growth and three lithographic steps that eliminates the need for aligned regrowth of the MQW modulator. Experimental results of the modulation depth and wavelength dependence are also reported.

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Photonics Technology Letters, IEEE  (Volume:12 ,  Issue: 6 )