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Modeling and design of a micromachined Fabry-Perot interferometer

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2 Author(s)
Bostan, C.-G. ; Nat. Inst. for Res. & Dev. in Microtechnol., Bucharest ; Avraynescu, V.

A physical model and its application to the design of a micromachined low-order tunable Fabry-Perot interferometer are discussed. The optical properties of the thin films as well as their surface defects are taken into account. The dependence of the free spectral range and the transmission bandwidth on the phase change which occurs on reflection are emphasized. A computer program written in MATLAB was applied to a particular structure

Published in:

Semiconductor Conference, 1999. CAS '99 Proceedings. 1999 International  (Volume:2 )

Date of Conference:

Oct 1999