Referenced Items are not available for this document.
This paper describes the manufacture of three dimensional microstructures, using p+ etch stop techniques. Our experiments focused on bulk and front side micromachining and the integration of these structures with optical waveguides for microsensors with optical read-out applications. By annealing treatment we reduce the tensile stress induced in the cantilever beams
Published in:
Semiconductor Conference, 1999. CAS '99 Proceedings. 1999 International
(Volume:2
)
Date of Conference: Oct 1999
- Page(s):
- 527 - 530 vol.2
- Meeting Date :
- 05 Oct 1999-09 Oct 1999
- Print ISBN:
- 0-7803-5139-8
- INSPEC Accession Number:
- 6529568
- Conference Location :
- Sinaia
- Digital Object Identifier :
- 10.1109/SMICND.1999.810601
- Product Type:
- Conference Publications
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