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Integral gauge pressure sensor with frequency output signal

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5 Author(s)
Beshliu, V.S. ; Int. Lab. HTS SSE, Kishinev, Moldova ; Kantser, V.G. ; Beldiman, L.N. ; Beshliu, V.V.
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The process of manufacture of a silicon pressure-voltage sensor based on the bulk micromachining technology and voltage-frequency converter based on the CMOS technology is described. The electrical scheme and thermocompensation circuits of sensitivity and offset or the pressure-frequency sensor are presented. The structure, design, principle of operation and main characteristics of the gauge pressure sensor with the frequency output signal are considered

Published in:

Semiconductor Conference, 1999. CAS '99 Proceedings. 1999 International  (Volume:2 )

Date of Conference:

Oct 1999