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Gold on chromium pressure sensing structures on polyimide membranes

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9 Author(s)

This paper presents the manufacturing of a simple pressure sensing structure supported on polyimide membranes obtained by micromachining of a GaAs substrate. The sensing element is a gold on chromium resistor on the polymide membrane. The technological process for the manufacturing of this structure is presented. The variation of ΔR/R vs. pressure and ΔR/R vs. temperature as well as the sensitivity of the structure ΔW(RΔp) vs. temperature are analysed The sensing element show high linearity, absence of hysteresis, and good sensitivity, and can be used in high temperature applications

Published in:

Semiconductor Conference, 1999. CAS '99 Proceedings. 1999 International  (Volume:2 )

Date of Conference:

Oct 1999