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Guided-wave Si CMOS process-compatible optical interconnects

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10 Author(s)
Chen, R.T. ; Microelectron. Res. Center, Texas Univ., Austin, TX, USA ; Wu, L. ; Lin, L. ; Choi, C.
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We report the formation of polyimide-based H-tree waveguides for a multi-GBit/sec optical clock signal distribution in a Si CMOS process compatible environment. Such a clock distribution system is to replace the existing electronic counterpart associated with high-speed supercomputers such as Cray T-90 machine

Published in:

Semiconductor Conference, 1999. CAS '99 Proceedings. 1999 International  (Volume:2 )

Date of Conference:

Oct 1999

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