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Optical actuation of micromechanical tunneling structures

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2 Author(s)
Dragoman, M. ; Nat. Res. & Dev. Inst. in Microtechnol., Bucharest, Romania ; Dragoman, D.

An efficient method to optically actuate a micromechanical cantilever is presented. Measurable responses are obtained for moderate light sources if electron tunneling occurs between the cantilever tip and a metallic contact below it. The small cantilever deflection due to light pressure produces large tunneling current variations. Several applications are presented

Published in:

Semiconductor Conference, 1999. CAS '99 Proceedings. 1999 International  (Volume:2 )

Date of Conference:

Oct 1999