Referenced Items are not available for this document.
An efficient method to optically actuate a micromechanical cantilever is presented. Measurable responses are obtained for moderate light sources if electron tunneling occurs between the cantilever tip and a metallic contact below it. The small cantilever deflection due to light pressure produces large tunneling current variations. Several applications are presented
Published in:
Semiconductor Conference, 1999. CAS '99 Proceedings. 1999 International
(Volume:2
)
Date of Conference: Oct 1999
- Page(s):
- 451 - 454 vol.2
- Meeting Date :
- 05 Oct 1999-09 Oct 1999
- Print ISBN:
- 0-7803-5139-8
- INSPEC Accession Number:
- 6529551
- Conference Location :
- Sinaia
- Digital Object Identifier :
- 10.1109/SMICND.1999.810584
- Product Type:
- Conference Publications
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