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Managing the negative impact of recipe diversity on wet process tools and capacity: a multi-fabricator model

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2 Author(s)
Carpenter, N. ; Microelectron. Div., IBM Corp., Essex Junction, VT, USA ; Hilscher, D.F.

This paper describes the results of a multi-fabricator site team in minimizing recipe diversity; the metrics used to measure the progress of the team are also defined. By identifying and measuring the differences in recipe and process locations within a route, process changes were implemented to make the process operations more standard between various fabricators and the technologies at a given fabricator. This work has resulted in eliminating unnecessary cleans, minimizing differences between various technologies, eliminating chemistries used for only a few recipes, and propagating the best practices among the fabricators

Published in:

Advanced Semiconductor Manufacturing Conference and Workshop, 1999 IEEE/SEMI

Date of Conference:

1999