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A quantitative approach for minimizing fab cost of ownership through systems integration

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4 Author(s)
Colvin, T.D. ; APD Group, PRI Autom. Inc., Mesa, AZ, USA ; Rayter, J. ; Paprotny, I. ; Mackulak, G.T.

The design of a semiconductor fab is a complex problem. Market competition, subsequent reduced product margins, and a heightened interest in cost of ownership (COO) have added additional dimensions. We propose a quantitative method for analyzing total system design tradeoffs. The key to this approach is designed flexibility. We propose that additional up front expenditure for flexibility allows for extended facility life and reduced total life cycle cost. A hypothetical comparison illustrates that from 1.5%-3.5% in annual savings result from an additional 10% initial investment, if the facility life can be extended five additional years

Published in:

Advanced Semiconductor Manufacturing Conference and Workshop, 1999 IEEE/SEMI

Date of Conference:

1999