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All electronic defect inspection, management, and reporting system

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12 Author(s)
White, T.R. ; Adv. Products Res. & Dev. Lab., Motorola Inc., Austin, TX, USA ; Brenizer, J. ; Dao, P. ; Lin, J.
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Described is an essentially all electronic defect inspection, management, and reporting system, integrating defect data, images, and bit maps. It is shown how the system increases the efficiency of inline defect monitoring by utilizing ADC, allowing dispositioning of lots at lower levels in the organization, focusing defect reduction efforts on those defects that affect yield, and shortening failure analysis cycle time

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Advanced Semiconductor Manufacturing Conference and Workshop, 1999 IEEE/SEMI

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