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Modeling gas by-products from MO-CVD thin-film depositions

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2 Author(s)
Jones, J.G. ; Res. Lab., Wright-Patterson AFB, OH, USA ; Jero, P.D.

This work seeks to develop an MO-CVD system using in situ sensors and automated process control to deposit controlled, reproducible oxide fiber coatings (e.g. LaAl11O18). A CVD system capable of continuous fiber coating has been assembled which employs liquid precursor delivery for precise precursor stoichiometry control and inert gas seals for near atmospheric operation. In-situ thermocouples and a mass spectrometer are used for process measurements. All of the system parameters are logged by and controllable by computer. A fuzzy logic controller was developed to control the flow rate based on the desired temperature or gas composition. A neural model of the process will be presented which translates the process settings into expected gas compositions

Published in:

Intelligent Processing and Manufacturing of Materials, 1999. IPMM '99. Proceedings of the Second International Conference on  (Volume:2 )

Date of Conference:

1999