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Realization and SEM observation of polysilicon and aluminium cantilever using surface micromachining technology

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4 Author(s)
Lucas, S. ; Groupe de Microelectron. et Visualisation, Rennes I Univ., France ; Outaleb, N. ; Bonnaud, O. ; Pinel, J.

This tutorial concerns graduate electronic engineering students, either in DESS, DEA or engineer formations. The aim of this training is to allow them to apply their knowledge of microelectronics lectures to surface micromachining technology. In this work, students fabricate a polysilicon and an aluminium cantilever beam by using the usual technological process steps in a cleanroom. The process is based on the stripping of an underlying sacrificial layer. At the end of the fabrication process, a scanning electron microscopy observation is performed

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Microelectronic Systems Education, 1999. MSE'99. IEEE International Conference on

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