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Fiber optic photoluminescence setup for spatially resolved measurements

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4 Author(s)
Banerjee, S. ; Lucent Technol., Holmdel, NJ, USA ; Chung-en Zah ; Bhat, R. ; Caneau, C.

Spatially resolved photoluminescence is used as a nondestructive tool to characterize semiconductor epitaxial wafers with a resolution better than the device dimensions. In this paper, we describe a novel photoluminescence measurement setup using fiber optic techniques for luminescence excitation and detection in a very simple confocal arrangement. A final spatial resolution as small as 5 μm±0.5 μm together with the compact design makes it very attractive

Published in:

Instrumentation and Measurement, IEEE Transactions on  (Volume:48 ,  Issue: 1 )

Date of Publication:

Feb 1999

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