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Development of a six-component miniature force sensor using silicon micromachining and conventional machining technologies [for microrobotics application]

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2 Author(s)
Jin, W.L. ; California Univ., Berkeley, CA, USA ; Mote, C.D.

A six-component miniature force sensor (5×5×5 mm3 ) is developed using microfabrication and conventional precision machining technologies. High sensitivity and high stiffness are obtained simultaneously with a novel silicon sensing element design. Fair agreement between predicted and measured sensitivities is obtained

Published in:

Instrumentation and Measurement, IEEE Transactions on  (Volume:47 ,  Issue: 3 )

Date of Publication:

Jun 1998

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