Development of a six-component miniature force sensor using silicon micromachining and conventional machining technologies [for microrobotics application]

A six-component miniature force sensor (5/spl times/5/spl times/5 mm/sup 3/) is developed using microfabrication and conventional precision machining technologies. High sensitivity and high stiffness are obtained simultaneously with a novel silicon sensing element design. Fair agreement between predicted and measured sensitivities is obtained.