Reverse ridge, large profile of single mode PLZT film waveguide and its Mach-Zehnder E-O modulator

We report the relatively low loss and large cross-section single mode PLZT film waveguide as well as its MZ type of an electro optic waveguide modulator. The reverse ridge waveguide was fabricated by first depositing an ITO thin film on an r-cut sapphire substrate. The ITO thickness was chosen to be in the range of submicrometer, as determined by a modefield.