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Manufacturing for design: putting process control in the language of the designer

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1 Author(s)
Potts, D.C. ; Fairchild Semicond., South Portland, ME, USA

A methodology is presented for evaluation of process control from the designer's perspective, that of overall electrical performance. Technology tables and a comprehensive set of strategically chosen wafer electrical tests are used to capture and maintain the electrical signature of a process

Published in:

Advanced Semiconductor Manufacturing Conference and Workshop, 1998. 1998 IEEE/SEMI

Date of Conference:

23-25 Sep 1998

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