Referenced Items are not available for this document.
This paper describes an intelligent line monitor system and highlights the features which make it superior to conventional line monitor systems. By citing examples from an IBM 0.25 μm technology fabricator, we show that an integrated and automated line monitoring strategy reduces time-to-results, provides a low cost-of-ownership, and delivers a short time to return-on-investment. The natural expansion and growth possibilities of such a system are also explored
Published in:
Advanced Semiconductor Manufacturing Conference and Workshop, 1998. 1998 IEEE/SEMI
Date of Conference: 23-25 Sep 1998
- Page(s):
- 93 - 102
- Meeting Date :
- 23 Sep 1998-25 Sep 1998
- ISSN :
- 1078-8743
- Print ISBN:
- 0-7803-4380-8
- INSPEC Accession Number:
- 6239908
- Conference Location :
- Boston, MA
- Digital Object Identifier :
- 10.1109/ASMC.1998.731411
- Product Type:
- Conference Publications
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