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Intelligent line monitor: maximum productivity through an integrated and automated line monitoring strategy

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4 Author(s)
Pilon, T. ; Microelectron. Div., IBM Corp., Essex Junction, VT, USA ; Burns, M. ; Fischer, V. ; Saunders, M.

This paper describes an intelligent line monitor system and highlights the features which make it superior to conventional line monitor systems. By citing examples from an IBM 0.25 μm technology fabricator, we show that an integrated and automated line monitoring strategy reduces time-to-results, provides a low cost-of-ownership, and delivers a short time to return-on-investment. The natural expansion and growth possibilities of such a system are also explored

Published in:

Advanced Semiconductor Manufacturing Conference and Workshop, 1998. 1998 IEEE/SEMI

Date of Conference:

23-25 Sep 1998

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