Cart (Loading....) | Create Account
Close category search window
 

Intelligent line monitor: maximum productivity through an integrated and automated line monitoring strategy

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

4 Author(s)
Pilon, T. ; Microelectron. Div., IBM Corp., Essex Junction, VT, USA ; Burns, M. ; Fischer, V. ; Saunders, M.

This paper describes an intelligent line monitor system and highlights the features which make it superior to conventional line monitor systems. By citing examples from an IBM 0.25 μm technology fabricator, we show that an integrated and automated line monitoring strategy reduces time-to-results, provides a low cost-of-ownership, and delivers a short time to return-on-investment. The natural expansion and growth possibilities of such a system are also explored

Published in:

Advanced Semiconductor Manufacturing Conference and Workshop, 1998. 1998 IEEE/SEMI

Date of Conference:

23-25 Sep 1998

Need Help?


IEEE Advancing Technology for Humanity About IEEE Xplore | Contact | Help | Terms of Use | Nondiscrimination Policy | Site Map | Privacy & Opting Out of Cookies

A not-for-profit organization, IEEE is the world's largest professional association for the advancement of technology.
© Copyright 2014 IEEE - All rights reserved. Use of this web site signifies your agreement to the terms and conditions.