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Gas sensors with laser-deposited active layers

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3 Author(s)
Vyslouzil, F. ; Dept. of Solid State Eng., Prague Univ., Czech Republic ; Myslik, V. ; Vrnata, M.

This article is concerned with comparison of the properties of acetonate and oxidic layer prepared using the impulse laser ablation method, and subsequent deposition LAD. Optimal technical conditions were found for preparation of layers suitable for use as chemical sensors. The properties of the deposition layers were studied on the basis of their FTIR spectra and by measuring their electrical conductivity. Changes in the electrical conductivity were evaluated in connection with detection of a reducing atmosphere. The attaining of sensitivity of about 350 for 1000 ppm H2 was amongst the best results obtained

Published in:

Advanced Semiconductor Devices and Microsystems, 1998. ASDAM '98. Second International Conference on

Date of Conference:

5-7 Oct 1998

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