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Two chips have been developed for vector control at Q band. The five bit-360/spl deg/ MMIC true phase shifter and the six bit -32 dB attenuator have been manufactured and tested in 0.25 /spl mu/m P-HEMT (UMS, PH25 Process). Maximum measured errors on single bits are 4/spl deg//2 dB. Combined insertion loss stays below 15 dB. Communication phased array system are made possible using such MMICs.