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Independently addressable VCSEL arrays on 3-μm pitch

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4 Author(s)
C. L. Chua ; Xerox Palo Alto Res. Center, CA, USA ; R. L. Thornton ; D. W. Treat ; R. M. Donaldson

We present an exceedingly dense linear vertical-cavity surface-emitting laser (VCSEL) array with independently addressable elements on a staggered 3-μm pitch. Our devices utilize an all-epitaxial structure and operate at a wavelength of 813 mm with threshold currents below 400 μA. The high-packing density is enabled by combining transparent contact technology with a planar laterally oxidized device architecture. The array exhibits low interelement thermal crosstalk and has electrical resistances of 3 M/spl Omega/ between adjacent array elements.

Published in:

IEEE Photonics Technology Letters  (Volume:10 ,  Issue: 7 )