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Fabrication of three-dimensional microstructures by electrochemically welding structures formed by microcontact printing on planar and curved substrates

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3 Author(s)
Jackman, Rebecca J. ; Dept. of Chem. & Chem. Biol., Harvard Univ., Cambridge, MA, USA ; Brittain, Scott T. ; Whitesides, George M.

This paper describes two convenient techniques for the fabrication of three-dimensional (3-D) structures with micron-sized features. The methods use microcontact printing (μCP) to define patterns with feature sizes as small as 20 μm both on planar substrates and on cylinders (diameter ~2 mm). Electrodeposition serves as a micron-scale tool for metal deposition and welding that transforms these patterned surfaces and cylinders into metallic complex 3-D microstructures (e.g., tetrahedra). Final tetrahedra (~2-cm sides) have feature sizes as small as 50 μm

Published in:

Microelectromechanical Systems, Journal of  (Volume:7 ,  Issue: 2 )