By Topic

Characterization of a high-sensitivity micromachined tunneling accelerometer with micro-g resolution

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$33 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

7 Author(s)
Cheng-Hsien Liu ; Dept. of Mech. Eng., Stanford Univ., CA, USA ; Barzilai, A.M. ; Reynolds, J.K. ; Partridge, A.
more authors

A new high-sensitivity bulk-silicon-micromachined tunneling accelerometer with micro-g resolution has been successfully fabricated and tested at Stanford University. This accelerometer is a prototype intended for underwater acoustics applications and is required to feature micro-g resolution at frequencies between 5 Hz and 1 kHz and can be packaged with circuitry in an 8-cm3 volume with a total mass of 8 g. This paper briefly describes the mechanical design of this tunneling accelerometer and focuses on the experiments carried out in our laboratory to test the tunneling transducer as well as on the experimental determination of accelerometer resolution. The exponential relationship between tunneling gap and tunneling current is verified and results in an effective tunneling barrier height of about 0.2 eV. The goal of this paper is to outline the measurements which are necessary to verify that the sensor is actually tunneling and to confirm that the accelerometer performance is consistent with what should be expected from a tunneling accelerometer

Published in:

Microelectromechanical Systems, Journal of  (Volume:7 ,  Issue: 2 )