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Multistator LIGA-fabricated electrostatic wobble motors with integrated synchronous control

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4 Author(s)
Samper, V.D. ; Inst. of Micro-Electron., Singapore ; Sangster, A.J. ; Reuben, R.L. ; Wallrabe, U.

A novel design of an electrostatic wobble motor is presented, which incorporates multiple concentric rotor-stator surface pairs to increase the space-usage efficiency and a segmented bearing for the implementation of synchronous control. The device has been successfully fabricated using the Lithographie, Galvanoformung, Abformung (LIGA) technique. The finite-element method is used to predict the available output torque, and the potential for extracting the useful output from the device is assessed

Published in:

Microelectromechanical Systems, Journal of  (Volume:7 ,  Issue: 2 )

Date of Publication:

Jun 1998

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