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Summary form only given. Low pressure hybrid (DC+RF) spraying system is developed and non-thermal properties are measured by electric (single+triple) probes and emission spectroscopy system. Since plasma density and electron temperature have been measured by assuming one-temperature isothermal electrons, which is only valid near the spray nozzle and axis, non-thermal electrons (or two-temperature electrons) are to be measured by a fast-scanning system installed with a single electric probe (SP) and a triple probe (TP). Data from SP and TP are compared to deduce the non-thermal properties. Ion (or excitation) temperature is to be measured under the assumption of local thermodynamic equilibrium (LTE) and non-LTE models. For the measurement of the emission intensity, combination of a 50cm-monochromator and movable optical fiber is develped.