Referenced Items are not available for this document.
The use of a bake prior to development stabilizes the develop end point of photo-BCB films and removes the time dependence of the develop end point. The elimination of this source of process variability enables the implementation of a develop process in which, for a given film thickness and set of bake conditions, the optimum develop time is a constant, and monitoring of the end point is unnecessary
Published in:
Advanced Packaging Materials, 1998. Proceedings. 1998 4th International Symposium on
Date of Conference: 15-18 Mar 1998
- Page(s):
- 82 - 86
- Meeting Date :
- 15 Mar 1998-18 Mar 1998
- Print ISBN:
- 0-7803-4795-1
- INSPEC Accession Number:
- 6016205
- Conference Location :
- Braselton, GA
- Digital Object Identifier :
- 10.1109/ISAPM.1998.664439
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