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Silicon-micromachined scanning confocal optical microscope

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2 Author(s)
D. L. Dickensheets ; Edward L. Ginzton Lab., Stanford Univ., CA, USA ; G. S. Kino

We describe a miniature scanning confocal optical microscope constructed from components micromachined using silicon and fused silica. The design, fabrication, and characterization of the components of the microscope as well as the assembly of the system are described. Sample images acquired using the instrument are also presented

Published in:

Journal of Microelectromechanical Systems  (Volume:7 ,  Issue: 1 )