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Electrostatic bottom-driven rotary stage on multiple conductive liquid-ring bearings

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5 Author(s)
Tingyi Leo Liu ; Mechanical and Aerospace Engineering Department, University of California, Los Angeles (UCLA) ; Guangyi Sun ; Jong Jin Kim ; Chih-Kong Ken Yang
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We present a 2 cm-diameter rotary stage electrostatically actuated by ~15 VDC. Multiple rings of an ionic liquid are used as both low-friction mechanical bearings and electric connections between the rotor and the substrate. The ring-bearing device is the first that was successfully rotated by electrostatic forces among the recent rotary devices involving a liquid bearing. Compared with the recent side-driven counterpart, the bottom-driven device of this report not only reduces the actuation voltage but also enables a reliable capacitive position sensing.

Published in:

Micro Electro Mechanical Systems (MEMS), 2013 IEEE 26th International Conference on

Date of Conference:

20-24 Jan. 2013