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Micro force plate array for measurement of ground reaction force of insect running

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3 Author(s)
Takahashi, H. ; Inf. & Robot Technol. Res. Initiative, Univ. of Tokyo, Tokyo, Japan ; Matsumoto, K. ; Shimoyama, I.

This paper reports on a micro force plate array for measurement of ground reaction forces of insect legs during running. The micro force plate is composed of a plate base and three beams whose surface and sidewall area are doped, which enable to detect both pressure and shear force. The device size and force resolution are 2000 μm × 500 μm × 20 μm (length × width × height) and 1 μN, respectively. Using this force plate array, the ground reaction forces of an ant was able to be measured.

Published in:

Micro Electro Mechanical Systems (MEMS), 2013 IEEE 26th International Conference on

Date of Conference:

20-24 Jan. 2013