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A dual lateral-field-excited bulk acoustic wave sensor array

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3 Author(s)
Winters, S. ; Lab. for Surface Sci. & Technol., Univ. of Maine, Orono, ME, USA ; Bernhardt, G. ; Vetelino, J.F.

Recently, there has been interest in the fabrication of multiple quartz crystal microbalances (QCMs) on a single substrate to create a sensor array. However, such devices are ultimately subject to the limitations of the QCM configuration, requiring electrodes and wires on the sensing surface of the crystal substrate, resulting in a cumbersome arrangement that is unable to detect electrical property changes. The lateral-field-excited (LFE) sensor is a novel sensing device that only requires electrodes on the back side of the substrate. With a bare sensing surface, the LFE sensor is a better choice for implementing a sensor array. The purpose of this paper is to report on the fabrication and testing of two independent LFE devices on a single substrate. The individual LFE elements are shown to respond to both electrical and mechanical property changes, with minimal crosstalk between the LFE elements.

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Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on  (Volume:60 ,  Issue: 3 )