By Topic

The designing and manufacturing of 1MHz Piezoelectric Micro-Machined Ultrasonic Transducer

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

3 Author(s)
Zhi-qun Suo ; Inst. of Acoust., Beijing, China ; Zhen-hong Hao ; Dong-hai Qiao

This paper has designed a new type of high frequency Piezoelectric Micro-machined Ultrasonic Transducer (PMUT) array in multi-units and parallel connection, based on sacrificial layer technology. It prepared the PMUT whose resonant frequency reached 1 MHz and studied on the process that the released sacrificial layer applied on the PMUT preparation. It measured the admittance frequency response curve of the PMUT, whose resonant frequency was 1.14 MHz, in line with expected result. It implemented the PMUT's transceiver test. From the test, the receiving sensitivity of the PMUT in 1 MHz was -255 dB (ref 1V/μPa), the acoustic pressure output was 131.2 dB (ref 1μPa·m/V), and the -3 dB band was about 68%.

Published in:

Piezoelectricity, Acoustic Waves and Device Applications (SPAWDA), 2012 Symposium on

Date of Conference:

23-25 Nov. 2012