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RF-MEMS technology permits practical implementations of high-Q (Q from 300 to over 1,000) tunable microwave filters with power handling in the >;1-10 W range, with significant tuning range (>;50% to 100%), and ultra-low power consumption. Continuously frequency-tunable filters with mechanical actuation in the opposite direction of RF-inducted pressure can reach powers up to several watts, using a variable compensation bias. Very high Q, and large tuning range can be achieved with this technology, both in planar and cavity tunable filters. Using several devices in parallel, RF-MEMS capacitor arrays can handle RF-powers better than 1 watt, without the need for any compensation tuning.
Date of Publication: Jan.-Feb. 2013