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A Time-Dependent Collisional Sheath Model for Dual-Frequency Capacitively Coupled RF Plasma

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4 Author(s)
Rahman, M.T. ; Dept. of Electr. & Electron. Eng., Bangladesh Univ. of Eng. & Technol. (BUET), Dhaka, Bangladesh ; Dewan, M.N.A. ; Ahmed, A. ; Chowdhury, M.R.H.

A time-dependent analytical model for capacitive sheath is developed for describing collisional radio-frequency sheath driven by two sinusoidal sources. In this model, it has been assumed that ion motion and velocity are time varying and sheath is collisional. The time-dependent terms in ion-fluid equations are ignored. Based on the assumption of steplike electron density profile model, analytical expressions for instantaneous sheath motion and sheath potential have been developed. The plasma-sheath motion and sheath potential are compared with a time-dependent model for collisionless and a time-independent model for collisional capacitively coupled plasma.

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Plasma Science, IEEE Transactions on  (Volume:41 ,  Issue: 1 )