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This paper presents effects of the parasitic circuit element parameter in RF (Radio Frequency) energy harvesting circuit. The RF energy harvesting circuit is composed of a loop antenna, a 6-stage Dickson charge pump and an output capacitor as an energy storage element. The parasitic circuit element parameter effects are discussed based on PSIM simulation, experiments with an equivalent RF power source and experiments on site. These results show the leakage current of the output capacitor and forward voltage drop of the diode affect the output voltage, and the junction capacitance of the diode affects the resonant frequency. In addition, the effects of parallel connection of two RF energy harvesting circuits are introduced.