IEEE.org| IEEE Xplore Digital Library| IEEE Standards| IEEE Spectrum| More Sites

Cart (Loading....) | Create Account | 

Close category search window
Author Searchbeta |  Advanced Search  |  Preferences |  Search Tips  |  More Search Options  
 
Browse Conference Publications > Planarization/CMP Technology ... Help

FullVision?? Endpoint for CMP of SiGe Fin Structures

Full Text Sign-In or Purchase

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $31
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing! close button
puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

8 Author(s)
Menk, G. ; Dhandapani, S. ; Huang, Y.-C. ; Wood, B.
more authors

FullVision(TM) is a real time, in situ optical endpoint system that enables the polish of SiGe fin structures with superior planarization performance. A production-proven endpoint tool for stop-in-film and stop-on-film applications, FullVision(TM) has been demonstrated for use in the CMP of advanced channel material films deposited by selective epitaxy. Keywords: Endpoint, FullVision(TM), Chemical-mechanical Polishing, FinFET, SiGe

Published in:
Planarization/CMP Technology (ICPT 2012), International Conference on

Date of Conference: 15-17 Oct. 2012

Page(s):
1 - 5
Print ISBN:
978-3-8007-3452-8
Conference Location :
Grenoble, France
Product Type:
Conference Publications

IEEE Account

Purchase Details

Profile Information

Need Help?


IEEE Advancing Technology for Humanity About IEEE Xplore | Contact | Help | Terms of Use | Nondiscrimination Policy | Site Map | Privacy & Opting Out of Cookies

A not-for-profit organization, IEEE is the world's largest professional association for the advancement of technology.
© Copyright 2013 IEEE - All rights reserved. Use of this web site signifies your agreement to the terms and conditions.