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A three-dimensional (3-D) test circuit examining power grid noise in a 3-D integrated stack has been designed, fabricated, and tested. Fabrication and vertical bonding were performed by MIT Lincoln Laboratory for a 150 nm, three metal layer SOI process. Three wafers are vertically bonded to form a 3-D stack. Noise analysis of three power delivery topologies is described. Calibration circuits for a source follower sense circuit compare the different power delivery topologies as well as the separate 3-D stacked circuits. The effect of the through silicon via (TSV) density on the noise profile of a 3-D power delivery network is experimentally described. A comparison of the peak noise for each topology with and without board level decoupling capacitors, and resonant behavior is provided, and suggestions for enhancing the design of a 3-D power delivery network are offered.
Date of Publication: Feb. 2013