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The authors report a simple method for the artificial fabrication of the complex three-dimensional (3D) ultrastructures of butterfly wing scales. This method uses chemical vapor deposition, UV lithography, and chemical etching to create the ultrastructures over a large area surpassing previously used focused ion beam techniques that are limited to microscopic areas. Furthermore, this method shows flexibility to modify nanostructure types and can precisely control shapes and dimensions and periodicity. Fabricated 3D ultrastructures are also replicated using a nanoimprint method into soft polymer materials. Reflectivity measurements and simulations of the master and polymer replicas show selective UV reflection consistent with the length scales used in such butterfly-like nanostructures.