Referenced Items are not available for this document.
The traditional models and techniques for studying reliability in integrated circuits may not be appropriate for nanoelectronics and nanosystems. In this paper, we present an overview of a number of materials and metrology techniques currently under development in our group at NIST. Among other topics, we will assess the techniques and models currently used for evaluating integrated circuit reliability, as well as present some new approaches.
Published in:
Nanotechnology (IEEE-NANO), 2012 12th IEEE Conference on
Date of Conference: 20-23 Aug. 2012
- Page(s):
- 1 - 5
- ISSN :
- 1944-9399
- Print ISBN:
- 978-1-4673-2198-3
- INSPEC Accession Number:
- 13045911
- Conference Location :
- Birmingham
- Digital Object Identifier :
- 10.1109/NANO.2012.6321886
- Product Type:
- Conference Publications
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