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Electrostatically tunable MEMS THz metamaterials based on DC/RF decoupled split-ring resonator arrays

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3 Author(s)
Zhengli Han ; Res. Center for Adv. Sci. & Technol., Univ. of Tokyo, Tokyo, Japan ; Fujita, H. ; Toshiyoshi, H.

High-frequency electromagnetic-field simulation HFSS has been performed on sub-millimeter scale split-ring resonator (SRR) metamaterials to propose electrostatically tunable THz frequency filters with integrated RF-MEMS variable capacitors and switches.

Published in:

Optical MEMS and Nanophotonics (OMN), 2012 International Conference on

Date of Conference:

6-9 Aug. 2012