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Some practical considerations in selecting the automated material transport system for a semiconductor factory

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2 Author(s)
J. J. Davis ; Motorola Inc., Chandler, AZ, USA ; P. K. Goel

Cost and reliability are prime considerations when selecting any tool for a semiconductor factory. When leading vendors can produce quality products that are virtually identical in cost and reliability, other factors must be considered in the purchase. For wafer transport systems, the aforementioned considerations need to be made in an effort to procure the most efficient system. Simulation is a proven tool, but experience teaches us that reality is not perfectly reflected in simulation. Using or developing a wafer transport system can be more successful against the backdrop of these experiences

Published in:

Advanced Semiconductor Manufacturing Conference and Workshop, 1997. IEEE/SEMI

Date of Conference:

10-12 Sep 1997