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Marathon and IRONMANTM testing of the Trikon Technologies Sigma ForceFillTM

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11 Author(s)
Strupp, J. ; Texas Instrum. Inc., Dallas, TX, USA ; Gonzalez, D. ; McKeon, D. ; Saran, M.
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This paper focuses on the testing and improvement of the Trikon Technologies Sigma ForceFillTM tool installed in a pilot line at the TI Dallas Productization Fab, DPI. A series of five tests were run on the system to determine its viability as a volume production tool

Published in:
Advanced Semiconductor Manufacturing Conference and Workshop, 1997. IEEE/SEMI

Date of Conference: 10-12 Sep 1997

Page(s):
109 - 114
Meeting Date :
10 Sep 1997-12 Sep 1997
ISSN :
1078-8743
Print ISBN:
0-7803-4050-7
INSPEC Accession Number:
5780948
Conference Location :
Cambridge, MA
Digital Object Identifier :
10.1109/ASMC.1997.630716
Product Type:
Conference Publications

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