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Effects of defect propagation/growth on in-line defect based yield prediction

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3 Author(s)
R. K. Nurani ; KLA-Tencor Corp., San Jose, CA, USA ; A. J. Strojwas ; W. Shindo

This paper discusses the importance of understanding and modeling the inter and intra layer defect propagation for in-line yield prediction. Some examples using real fabline data are presented to illustrate the significance of this problem

Published in:

Advanced Semiconductor Manufacturing Conference and Workshop, 1997. IEEE/SEMI

Date of Conference:

10-12 Sep 1997