Referenced Items are not available for this document.
This project integrates flexible data collection module, relational database, manufacturing execution system (MES) interface, and a simulation system that employs statistical approach and advanced numerical processing methodology. Concept of process-step-decoupling using statistical data correlation and automatic simulation calibration are implemented. The purpose is to have an accurate system that satisfies manufacturing requirements and at the same time a flexible system that satisfies development requirements. This tool is practical in the sense that the maintenance, employment and development cycle are in synchronize with the technology development cycle, and hence the help that the engineer needed can be provides at the right time
Published in:
Advanced Semiconductor Manufacturing Conference and Workshop, 1997. IEEE/SEMI
Date of Conference: 10-12 Sep 1997
- Page(s):
- 33 - 36
- Meeting Date :
- 10 Sep 1997-12 Sep 1997
- ISSN :
- 1078-8743
- Print ISBN:
- 0-7803-4050-7
- INSPEC Accession Number:
- 5780933
- Conference Location :
- Cambridge, MA
- Digital Object Identifier :
- 10.1109/ASMC.1997.630701
- Product Type:
- Conference Publications
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